发明名称 ELECTRO-OPTICAL DISPLAY DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an electro-optical display device preventing a display unevenness by simplifying a manufacturing process for a TFT structure, while accurately controlling the film thickness of a semiconductor layer as a TFT channel without limiting the quality of the material of source and drain electrodes. SOLUTION: In the electro-optical display device, the drain electrode 26 is disposed so as to be extended extensively over the upper section of a transparent insulating substrate 1 in the lower section of a picture-element electrode 30 from the upper section of an active region layer AR. In the source electrode 24 and a source wiring 25, the end faces are disposed at places retracted from either end face of a semiconductor film 6. The end face of the drain electrode 26 on the active region layer AR is also disposed at the place retracted from the end face in a relationship approximately parallel with the semiconductor film 6. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006351844(A) 申请公布日期 2006.12.28
申请号 JP20050176252 申请日期 2005.06.16
申请人 MITSUBISHI ELECTRIC CORP 发明人 MASUDA MEGUMI;ARAKI TOSHIO;HINO TERUSHIGE
分类号 H01L21/336;H01L21/3205;H01L23/52;H01L29/41;H01L29/417;H01L29/786;H01L51/50 主分类号 H01L21/336
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