| 摘要 |
PROBLEM TO BE SOLVED: To manufacture Josephson element employing an organic thin film. SOLUTION: An object 10b for depositing film is put in vacuum atmosphere to adsorb trimethylaluminum onto the surface of a first superconductive electrode film 13 consisting of the organic thin film, and evacuation is effected to introduce ozone gas thereafter. An aluminum oxide thin film 14<SB>1</SB>is formed by reaction between trimethylaluminum and ozone gas. Residual gas and reaction by-products are removed by the evacuation. The introductions of trimethylaluminum and ozone gas are effected alternately by a plurality of times to laminate the alumina thin films 14<SB>1</SB>, 14<SB>2</SB>and form a tunnel barrier film. When second superconductive electrode film is formed on the surface of tunnel barrier film, the Josephson element can be obtained. COPYRIGHT: (C)2007,JPO&INPIT
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