| 摘要 |
PROBLEM TO BE SOLVED: To provide a homogenizing optical element etc. capable of sufficiently homogenizing light with a compact composition. SOLUTION: The homogenizing optical element 110 which roughly homogenizes the intensity distribution of a beam of light by propagating the light, comprises at least a first structure 104 and a second structure 105 disposed on the projection side of the first structure 104. The first structure 104 and the second structure 105 are equipped with single rod integrators that propagate the light to a first direction, or a plurality of rod integrators that are disposed in parallel to at least either of a second direction and a third direction which are roughly perpendicular to the first direction, and propagate the light to the first direction. The number of the rod integrators 112 equipped to the first structure 104 is smaller than that of the rod integrators 113 equipped to the second structure 105. COPYRIGHT: (C)2007,JPO&INPIT
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