| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer easily adjusting arrangement of a measuring object while avoiding interference noise. SOLUTION: A wavelength variable light source 201 can change the wavelengthλof outgoing light in the range of scanning widthΔλ. The coherence length L of the interferometer 200 is determined byΔλandλ. A control part 300 sets the scanning widthΔλto a proper size and makes a CCD camera 209 take a coherence fringe image. At this time, exposure time Te is set longer than the time for wavelength scanning. COPYRIGHT: (C)2007,JPO&INPIT
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