| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating pinholes in organic hard films and highly accurately detecting the presence or absence, a size, and a distribution of pin holes present in inorganic hard films more easily than a conventional method, and also to provide a pinhole detector used for the same. SOLUTION: One surface of the inorganic hard film is irradiated with light, as inspection light, having a wavelength region of which the transmittance is low to the material of an inorganic hard film. By measuring light transmitted through pinholes in the inorganic hard film by an optical receiver installed at a position opposed to an inspection light source on both sides of the film, pinholes in the inorganic hard film are evaluated in the method for evaluating pinholes in organic hard films and the pinhole detector for the same. COPYRIGHT: (C)2007,JPO&INPIT
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