| 摘要 |
PROBLEM TO BE SOLVED: To provide a functional droplet coater which conducts a rapid transition between a coating process by which functional droplets are ejected on a substrate and a drying process by which the functional droplets ejected on the substrate are dried, as the substrate remains laid on the same stage by optionally repeating the coating process and the drying process once more or more than one time to prevent the functional droplets on the substrate from permeating and the substrate from fracture. SOLUTION: Estimation is made by step S8 whether a pattern formation has been completed or not. In case the pattern formation has not been completed, a stage 5 is transferred to a predetermined position under a drawing unit 3 by step S9 as a stage transfer process. Returning to step S3, the pattern is made on the substrate 50 by ejecting the functional droplets 10 from a functional droplets ejecting head 11. Therefore, this process is repeatedly executed at least one time until the pattern formation is completed. When the pattern formation has been completed, the processes is finished by removing the substrate 50 from the stage 5. COPYRIGHT: (C)2007,JPO&INPIT
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