| 摘要 |
PROBLEM TO BE SOLVED: To enlarge a cleaning treatment space to cope with various treating objects with different thicknesses by securing a wide space between counter electrodes serving as the cleaning treatment space. SOLUTION: A third electrode 7 is placed between the pair of counter electrodes 3 for generating plasma extending from one electrode to the other, the counter electrodes being provided with a process gas supplying means 5 supplying the process gas between the counter electrodes. A narrow discharge space d easy for spark discharging is formed at a part between the counter electrodes. Otherwise, the space between the counter electrodes is irradiated with soft X-rays to generate residual electrons necessary for the initial lighting time of plasma. COPYRIGHT: (C)2007,JPO&INPIT
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