| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas floating unit and a gas floating carrying device, capable of highly accurately adjusting a flow rate of jetting gas, and avoiding disturbing a down flow in a clean room when used in the clean room of a down flow system. SOLUTION: This gas floating unit 3 floats a carrying object 2 from a carrying surface by jetting air from a plurality of air jetting parts 6. The air jetting parts 6 have a pressurized air supply passage 12 supplying pressurized air, an orifice member 14 covering the opening end 13 of the pressurized air supply passage 12 in close contact and forming a slit communicating with the pressurized air supply passage 12, and an inner peripheral wall 16 arranged around the orifice member 14 and jetting air to an under surface of the carrying object 2 by changing the flowing direction of the air jetted from the orifice member 14. The opening area of the orifice member 14 is formed smaller than the opening area of the pressurized air supply passage 12, and the air is jetted toward the inner peripheral wall 16. COPYRIGHT: (C)2007,JPO&INPIT
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