| 摘要 |
In a sputtering target assembly comprising a plurality of tiles bonded to a target backing plate with gaps formed between the tiles, centering mechanisms for aligning and centering each of the tiles to the backing plate. The centering mechanism for each tiles can comprise a two or three grooves formed in the backing plate along axes intersecting near the tile center and slidably accommodating corresponding pins extending from the tile. Alternately, a pin and groove can be combined with another tile pin and a circular hole in the backing plate near the tile center.
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