| 摘要 |
<p>A heat treating device comprising a treating room housing a substrate, a plurality of light sources provided above the treating room to respectively illuminate the substrate, a first reflector having an inner surface that forms a dome-shaped reflection surface and reflecting parts of lights output from respective light sources to lead them to the substrate, and a plurality of second reflectors respectively provided for respective light sources and reflecting/condensing lights from respective light sources to lead them to the substrate, characterized in that the reflection surface of each second reflector has part of a spheroidal surface or a curved surface approximate to it that surrounds a first focal point in order to form the first focal point at a position at which each light source is disposed and to form a second focal point on a side where the substrate is disposed.</p> |
