发明名称 IMAGE EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an image exposure device for preventing the quality of an exposure image from deteriorating, for example, when dust adheres to a microlens array. <P>SOLUTION: The image exposure device comprises a spatial light modulator comprising a two-dimensional arrangement of a great number of pixel portions each modulating irradiated light; a light source for applying light to the spatial light modulator; and an image-forming optical system that includes a microlens array 55 having an arrangement of a microlenses 55a each individually converging light from each pixel section of the spatial light modulator in an array and forms an image by light modulated by the spatial light modulator on a photosensitive material. The microlens array 55 is arranged so that a surface which carries the microlens 55a faces the side of the spatial light modulator, and has a thickness that is larger than the focal distance of the microlens. As a result, a focal position A in the microlens is inside the microlens array 55. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006350011(A) 申请公布日期 2006.12.28
申请号 JP20050176459 申请日期 2005.06.16
申请人 FUJIFILM HOLDINGS CORP 发明人 ISHIKAWA HIROMI;ISHII SHUICHI
分类号 G03F7/20;G02B26/08;H01L21/027 主分类号 G03F7/20
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