发明名称 LIGHTING DEVICE, PROJECTION ALIGNER, AND METHOD OF MANUFACTURING MICRODEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a high efficiency lighting device, for example, a lighting device capable of reducing unevenness in lighting, a missing flux or the like. <P>SOLUTION: The lighting device includes a collector mirror (11b) placed in a light flux from a light source (11a) and an integrator (3) consisting of a plurality of unit mirrors for generating a secondary light source arranged in parallel in the light flux passing through the collector mirror (11b). The lighting device is characterized by that it includes a compensation means (21) placed in any of light paths from the light source (11a) to the integrator (13) for compensating a hollow in the flux incident to the integrator (3), and a correction means (22) provided in any of the light paths for reducing unevenness in a light quantity of the flux. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006351586(A) 申请公布日期 2006.12.28
申请号 JP20050172241 申请日期 2005.06.13
申请人 NIKON CORP 发明人 SUZUKI KENJI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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