发明名称 Micro-embossing fabrication of electronic devices
摘要 A method of forming an electronic device on a substrate 10 , comprising: embossing the substrate 10 , surface treating the substrate so that unindented portions 11 repel a solution of a first material 60 , and depositing a solution of the first material 60 in indentations 12 on the substrate 10 formed by the embossing. The substrate is then annealed so that level of the first material is the same as the surface of the substrate. The first material 60 in the indentations can then, for example, be used as the source and drain in the subsequent formation of a TFT.
申请公布号 US2006290021(A1) 申请公布日期 2006.12.28
申请号 US20060453974 申请日期 2006.06.16
申请人 SEIKO EPSON CORPORATION 发明人 LI SHUNPU;NEWSOME CHRISTOPHER;RUSSELL DAVID;KUGLER THOMAS
分类号 B29C47/00;B32B23/08;H01L51/00;H01L51/05;H01L51/10 主分类号 B29C47/00
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