发明名称 DIRECT TOOL LOADING
摘要 The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
申请公布号 WO2006091593(A3) 申请公布日期 2006.12.28
申请号 WO2006US06103 申请日期 2006.02.17
申请人 ASYST TECHNOLOGIES, INC.;BONORA, ANTHONY, C.;KROLAK, MICHAEL;HINE, ROGER, G. 发明人 BONORA, ANTHONY, C.;KROLAK, MICHAEL;HINE, ROGER, G.
分类号 H01L21/00 主分类号 H01L21/00
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