| 摘要 |
A plasma processing apparatus is provided to prevent polymers from falling on the surface of a confinement ring by using alumina instead of quartz as a confinement ring material. A plasma processing apparatus compresses a process chamber(12), two parallel electrodes, and a plurality of confinement rings. The two parallel electrodes(18t,18b) are installed in the process chamber. The plurality of confinement rings(20) are used for confining a predetermined plasma within a predetermined region between the two parallel electrodes. The plurality of confinement rings are made of alumina.
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