| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device in which the stop of inspection for a prolonged period is prevented when work is performed by a person in the substrate inspection device. SOLUTION: A mini environment system which makes clean air from a filter fan unit 5 flow into a device body 2 is employed in the substrate inspection device 1. A high cleanliness part 3 which has cleanliness higher than that of an external part by the clean air is partitioned by a plurality of partitioning plates 51, 53 and 54 into a first region 60 and a second region 61. A lens barrel 40, etc. of a microscope is arranged in the first region 60, and a substrate W is carried to the second region 61. COPYRIGHT: (C)2007,JPO&INPIT
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