| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-emitting laser, and its manufacturing method and apparatus, capable of controlling an oscillation wavelength with high accuracy. SOLUTION: In order to fabricate the surface emitting laser 1 which can be controlled with high accuracy in its oscillation wavelength, there are formed a lower DBR layer 13, an active layer 14, and a first upper DBR layer (upper reflecting layer) 15A on an n-type GaAs substrate 12 on one surface of which an n electrode 11 is formed. Reflectivity or transmittance is measured in this step, and there is formed a wavelength adjusting layer 16 for wavelength adjustment on the first upper DBR layer 15A so as to ensure desired oscillation wavelength. Furthermore, there are formed a second upper DBR layer (upper reflecting layer) 15B and a p electrode 17 on the wavelength adjusting layer 16. COPYRIGHT: (C)2007,JPO&INPIT
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