Scanning method for near field optical microscopy involves illumination of scanning equipment which has probe litter with lighting equipment and which is arranged in predetermined measuring position above surface of sample

摘要

The method involves illumination of scanning equipment (10) which has a litter probe with a lighting equipment (11) and which is arranged in a predetermined measuring position above the surface (2) of a sample (1). An illumination equipment (20) and a near field effect is generated between the litter probe and the sample. Detection of light scattered from the litter probe with detector equipment (30) for generating a detector signal which is characterized for a sample quality according to the measuring position. Independent claims are also included for the following: (A) Scanning device for near field optical microscopy; and (B) Application of method or device.