发明名称 PROCESS CHANGE DETECTION THROUGH THE USE OF EVOLUTIONARY ALGORITHMS
摘要 <p>The present invention provides a method for creating a process change detection algorithm. An evolutionary computing technique is applied to at least one process dataset containing at least one known process change. The evolutionary computing technique will generate a process state function (or a scaling coefficient set for use with an existing process state function) that optimizes detection of the known process changes. The generated process state function or coefficients can then be applied thereafter to future datasets (either in real-time or after processing) to detect process changes.</p>
申请公布号 WO2006138199(A1) 申请公布日期 2006.12.28
申请号 WO2006US22705 申请日期 2006.06.12
申请人 UNAXIS USA INC. 发明人 PLUMHOFF, JASON
分类号 G05B23/02;H01L21/66 主分类号 G05B23/02
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