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发明名称	Behälter
摘要
申请公布号	DE69836425(D1)	申请公布日期	2006.12.28
申请号	DE19986036425	申请日期	1998.04.06
申请人	DAINICHI SHOJI K.K.	发明人	ISHIKAWA, TOSHIO;KINPARA, MINEO
分类号	H01L21/68;H01L21/00;H01L21/673;H01L21/677	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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