| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface texture measuring machine capable of improving the repeatability of surface texture measurement. SOLUTION: The surface texture measuring machine 10 comprises an illumination device 12 irradiating a work 22 to be an object of surface texture analysis with illumination light 24, a light quantity detector 14 detecting the light 26 obtained by irradiating the work 22 with the illumination light 24 from the illumination device 12 to output the light quantity data 28, an external light detector 16 detecting the luminance of the surrounding light 30 of the measuring environment and outputting the surrounding light data 32, a comparison means 18 monitoring the variation from a predetermined reference value of the surrounding light data 32 from the external detector 16 and an automatic correction means 20 for correcting the light quantity data 28 of the light quantity detector 14 according to the variation value when the variation value monitored with the comparison means 18 exceeds a specific value. It performs surface texture analysis of the work 22 based on the light quantity data 28 from the light quantity detector 14. COPYRIGHT: (C)2007,JPO&INPIT
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