| 摘要 |
PROBLEM TO BE SOLVED: To compatibly materialize appropriate life of a drive motor of a pump and appropriate pump output corresponding to properties of liquid and early stabilization of a delivery condition at a time of bubble bite. SOLUTION: In this control method of a pump 24 capable of selectively changing over operation mode between a high output mode and a low output mode by controlling rotation speed of a drive motor 24 and sucking chemical stored in a predetermined vessel T1 and delivering the same in a downstream side, a condition of chemical delivered from the pump is detected by a chemical flow rate sensor 26, and the operation mode of the pump 24 is changed over between the high output mode and the low output mode according to the condition of the delivered chemical detected by the sensor. Also, the pump is operated in the high output mode at a time of start of suction of chemical and the operation mode of the pump is changed over to low output mode when flow rate detection value by the chemical flow rate sensor becomes a predetermined value or greater. COPYRIGHT: (C)2007,JPO&INPIT
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