发明名称 |
Method for continuous plasma treatment or coating of electrically insulated workpieces under atmospheric pressure useful for coating electrically insulated plates and strips with workpiece below high voltage electrode, etc |
摘要 |
Method for continuous plasma treatment or coating of electrically insulated workpieces under atmospheric pressure, especially plates or strip, where the workpiece is located below a high voltage, preferably ac electrode which extends transversely in the movement direction over the width of the workpiece surface, where the electrode and workpiece are offset in the movement direction. A first chamber between the electrode and workpiece is filled with a first atmosphere and a second chamber on the workpiece side oriented away from the eletrode and adjacent to its rear side is filled with a second, different from the first atmosphere. The high voltage and the two atmospheres are selected so that a plasma discharge is provoked in the second atmosphere. |
申请公布号 |
DE102005029360(A1) |
申请公布日期 |
2006.12.28 |
申请号 |
DE20051029360 |
申请日期 |
2005.06.24 |
申请人 |
SOFTAL ELECTRONIC ERIK BLUMENFELD GMBH & CO. KG |
发明人 |
PRINZ, ECKHARD;PALM, PETER;FOERSTER, FRANK |
分类号 |
B01J19/08;C23C16/505 |
主分类号 |
B01J19/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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