Miniaturisierter optischer Evaneszent-Feld-Sensor zur Gasanalyse

摘要

An optical waveguide lies on an optical transparent substrate or optical transparent layer having a lower refractive index than the waveguide core. Preferred Features: The waveguide is structured for the IR region and single crystalline silicon is used as the optical transparent material. The waveguide is made from Si, Al2O3, TiO2, Si3N4 or SiO2. The field concentration is increased using a ribbed structure