METHOD FOR DEPOSITING CARBIDE COATINGS OF HIGH-FUSION METALS

摘要

The invention relates to a method for depositing layers of carbide of at least one high-fusion metal (3) on at least one object (8) using high-speed electron beam evaporation in a vacuum chamber (1). According to the invention: an atmosphere that contains carbon is created in said vacuum chamber (1) by the influx of a reactive gas; the high-fusion metal (3) is evaporated using an electron beam (5); the deposition is supported by a plasma, the latter being generated on the surface of the high-fusion metal (3) that is to be evaporated by means of a diffuse arc discharge; and the coating rate is at least 20 nm/s and the object temperature is maintained at between 50 °C and 500 °C during the deposition process.