| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of washing an optical element while suppressing remaining contamination of an abrasive or insufficient washing of stain, and obtaining high washing quality even in a one-piece flow production system or in a small lot production system. SOLUTION: This washing method of the optical element comprises processes for: dipping the optical elements in a washing solution applied with ultrasonic wave (dipping washing process:S01); rinsing by sprinkling and running pure water applied with ultrasonic wave of a high frequency to the optical elements (rinsing process:S02); and rotatingly drying the optical elements (drying process:S03). COPYRIGHT: (C)2007,JPO&INPIT
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