| 摘要 |
PROBLEM TO BE SOLVED: To provide a dilution apparatus enhancing a mixing property of dilution chemicals and capable of obtaining the dilution chemicals of a predetermined dilution magnification even when a dilution operation is stopped at a midway, and a dilution method. SOLUTION: The dilution method for obtaining the dilution chemicals of a predetermined dilution magnification by diluting the chemicals with a dilution liquid is provided with a first feeding step for feeding at least the chemicals by operating at least any one of a chemical feeding means 22 and a dilution liquid feeding means 14 based on a setting value of the dilution magnification, detection data of a chemical feeding amount detection means 26 and detection data of a dilution liquid feeding amount detection means 18; and a second feeding step for only feeding the dilution liquid. Further, at stopping of the chemical feeding means 22 or the dilution liquid feeding means 14, the dilution magnification is calculated at stopping and the dilution liquid or the chemicals can be further fed according to the dilution magnification. COPYRIGHT: (C)2007,JPO&INPIT
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