Pressure sensor for vehicle, has pedestal including through hole for introducing pressure to chip, and gel material filled in concave portion and hole for protecting diaphragm of chip, where diameter of hole is large

摘要

The sensor has a substrate including a sensor chip (10) on one side and a concave portion on another side. An area of chip disposition on the former side of the substrate corresponds to an area of a concave portion on the latter side of the substrate to form a thin portion. A piezo-resistor is provided in the chip for outputting a sensor signal. A pedestal has a through hole for introducing the pressure to the chip on the thin portion. A gel material (30) is filled in the concave portion and the hole for protecting a diaphragm (14) of the chip, where diameter of the hole is large.