| 摘要 |
<P>PROBLEM TO BE SOLVED: To supply a material capable of providing an electrostatic chuck which is excellent in dimensional stability, can obtain high surface precision and is drivable at high speed and low voltage. <P>SOLUTION: The low-thermal expansion/high-specific rigidity ceramic sintered body being the above material has the chemical composition of, by mass, 8-17.2% MgO, 22-38% Al<SB>2</SB>O<SB>3</SB>, 49.5-65% SiO<SB>2</SB>, 0.1-2.5% Li<SB>2</SB>O and 1.8-3% C, and has the chemical-composition mass ratios of (SiO<SB>2</SB>-8×Li<SB>2</SB>O)/MgO≥3 and (SiO<SB>2</SB>-8×Li<SB>2</SB>O)/Al<SB>2</SB>O<SB>3</SB>≥1.2. Further, the ceramic sintered body has the absolute value of thermal expansion coefficient at room temperature (23°C) of ≤6×10<SP>-7</SP>/°C, Young's modulus of ≥100 GPa, specific rigidity of ≥40 GPa×cm<SP>3</SP>/g and volume resistivity of ≥1×10<SP>8</SP>Ωcm but <1×10<SP>11</SP>Ωcm. <P>COPYRIGHT: (C)2007,JPO&INPIT |
