| 摘要 |
PROBLEM TO BE SOLVED: To provide apparatus/method for supplying object to be processed, with which an inside of a container where the processed object is stored can be kept under desired air atmosphere, and the processed object can be supplied into a processor with fewer number of processes. SOLUTION: The processed object supply apparatus 20 is arranged adjacent to the processor 10, having a shielding wall 11. The apparatus 20 is provided with a body 21, which receives the transported container 40, supplies the processed object stored in the container into the processor, and can be fitted to the processor 10; mounting stands 30 and 31 which can be disposed inside the body 21, and on which the container 40 can be mounted; and an air substitution mechanism 60, which detects that the container 40 has been arranged on the mounting stands 30 and 31, and substitutes the inside of the container for prescribed gas atmosphere. COPYRIGHT: (C)2007,JPO&INPIT
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