发明名称 IMAGE EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an exposure device for preventing the image-forming characteristics of light through a microlens from deteriorating. <P>SOLUTION: The image exposure device comprises a spatial light modulator comprising a two-dimensional arrangement of a great number of pixel portions each modulating irradiated light; a light source for applying light to the spatial light modulator; and an image-forming optical system that includes a microlens array 55 having an arrangement of a microlenses 55a each individually converging light from each pixel section of the spatial light modulator in an array and forms an image by light modulated by the spatial light modulator on a photosensitive material. A temperature detection sensor 305 and a temperature regulator 306 are mounted to the microlens array 55, and an entire control section 300 operates the temperature regulator 306 so that the temperature of the microlens array 55 detected by the temperature detection sensor 305 is within a prescribed temperature range. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006349957(A) 申请公布日期 2006.12.28
申请号 JP20050175607 申请日期 2005.06.15
申请人 FUJIFILM HOLDINGS CORP 发明人 ISHIKAWA HIROMI
分类号 G03F7/20;G02B3/00;H01L21/027 主分类号 G03F7/20
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