| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating body composed by maximizing excellent heat conduction of an AlN substrate and having a large heat generation surface; and to provide its manufacturing method. SOLUTION: This heating body includes: the AlN substrate 1; a heat element 3 formed on the front or back surface of the AlN substrate 1 so as to extend in a strip-like form along the longitudinal direction of the AlN substrate 1; and a protective film formed to cover the heat element 3. The protective film has a first protective film 4a covering at least the heat element as a part of its base and a second protective film 4b covering the first protective film 4a. Both thicknesses of oxide films 2 formed on the front and back surfaces of the AlN substrate 1 are not greater than 2% of that of the AlN substrate 1. Both the heat element 3 and the first protective film 4a are formed as porous films and the second protective film 4b is formed as a non-porous film. COPYRIGHT: (C)2007,JPO&INPIT
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