发明名称 Manufacturing method for packaged semiconductor device
摘要 A semiconductor device in which moisture penetration into the package interior is suppressed, comprising a rewiring layer formed by plating, with improved reliability of electrical characteristics. On the main surface of a semiconductor chip comprising circuit elements and formed on a wafer, a passivation film opposing the circuit elements is formed, so as to expose a first region of the main surface along the edges of the main surface. An insulating film, which extends over the main surface and along the side faces of this passivation film and onto the main surface of the semiconductor chip, is formed such that there remains a second region within the first region, along the edges of the main surface. A sealing layer covering the insulating film is then formed on the second region.
申请公布号 US2006292742(A1) 申请公布日期 2006.12.28
申请号 US20060511267 申请日期 2006.08.29
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 NAGASAKI KENJI
分类号 H01L21/00;H01L23/12;H01L21/28;H01L21/31;H01L21/56;H01L21/60;H01L23/48 主分类号 H01L21/00
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