| 发明名称 |
Tunable resonator with MEMS element |
| 摘要 |
According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.
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| 申请公布号 |
US2006290445(A1) |
申请公布日期 |
2006.12.28 |
| 申请号 |
US20050153998 |
申请日期 |
2005.06.16 |
| 申请人 |
INTEL CORPORATION |
发明人 |
SU JUN;SHIM DONG S.;MA OING;RAO VALLURI R. |
| 分类号 |
H03H9/70;H03H9/56 |
主分类号 |
H03H9/70 |
| 代理机构 |
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代理人 |
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| 主权项 |
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