Calibration standard to calibrate devices for non-destructively measuring thickness of thin layers has standard with bearing surface plane-parallel with its measuring surface and permanently provided on carrier layer by plating via rubbing

摘要

A calibration standard has a carrier layer (12) with a basic material and having a measuring surface (16) plane-parallel to its bearing surface (14); a standard (17) applied on carrier layer and having a bearing surface (18) plane-parallel with its measuring surface (19) for bearing on measuring surface of carrier layer; and an auxiliary pole (21) with a contact surface (23) plane-parallel to measuring surface of standard. The standard is permanently provided on carrier layer by plating via rubbing; and is surrounded by a frame.