| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator equipped with a vertical comb-shaped electrode. SOLUTION: The actuator is provided with a stage 120 oscillating in a first direction, a support member 130 supporting the oscillating movement of the stage 120, vertical drive comb-shaped electrodes 122 externally extending from the opposite sides facing the first direction of the stage 120, and a stage drive part having a vertical stationary comb-shaped electrode 132 formed on a substrate 110 so as to be arranged alternately with the vertical drive comb-shaped electrodes 122. A stationary comb-shaped electrode 140 is provided with a first stationary comb-shaped electrode 143 formed on the substrate 110 lower than the drive comb-shaped electrode 122, an insulating layer 144 formed on the first stationary comb-shaped electrode 143, and a second stationary comb-shaped electrode 145 formed on the insulating layer 144 and higher than the lower part face of the drive comb-shaped electrode 122. COPYRIGHT: (C)2007,JPO&INPIT
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