发明名称 GRINDING METHOD OF MAGNETIC DISK SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a grinding-processing method in which quality of products is improved by preventing dirt of a grinding pad and clogging caused by grinding and preventing variation of quality of coarseness of a ground surface. SOLUTION: The grinding method of a glass substrate for a magnetic disk includes at least a process in which the glass substrate for the magnetic disk is ground and a process in which the glass substrate is rinsed after grinding. The grinding process includes a finish-grinding-processing-process using colloidal silica as a main component of grinding grains. The method is characterized in that the rinse process is performed while rinse liquid is applied without stopping a surface plate directly after this grinding, the rinse liquid used in this rinse process is pure water including surfactant, further, pH is adjusted to 8-12 by adding alkali. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006351081(A) 申请公布日期 2006.12.28
申请号 JP20050174056 申请日期 2005.06.14
申请人 FUJI ELECTRIC HOLDINGS CO LTD 发明人 KAINUMA KENGO;ICHINO MITSUYOSHI;JINNAI NAOHIRO;KOBAYASHI TAKESHI;HIGUCHI KAZUTO
分类号 G11B5/84;C03C19/00 主分类号 G11B5/84
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