摘要 |
PROBLEM TO BE SOLVED: To provide a laser optical device capable of continuing the intensity distribution of original beams to some extent in the case of combining two or more beams. SOLUTION: In a first splitter, the first beam is split into a plurality of beams through a plurality of lenses arranged in a first direction, then, a first beam group is formed. Similarly, in a second splitter, a second beam is split, then, a second beam group is formed. The beams of the first beam group and the beams of the second beam group are alternately arranged by a combiner in a third direction on a first virtual surface. The arrangement order of the beams of the first beam group in the third direction is the same as the arrangement order of the beams just before being split by the first splitter in the first direction, and the arrangement order of the beams of the second beam group in the third direction is the same as the arrangement order of the beams just before being split by the second splitter in the second direction. A lens for the first splitter, the corresponding lens of an exit side lens array, and also, a lens for the second splitter and the corresponding lens of the exit side lens array constitute an afocal optical system. COPYRIGHT: (C)2007,JPO&INPIT
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