| 摘要 |
PROBLEM TO BE SOLVED: To provide an additive for a bath, without causing problems such that the insulation among circuits becomes inferior on plating electronic parts such as a semiconductor device, etc., a sulfocarboxylic acid agent capable of being used for the above, further a higher purity sulfocarboxylic acid ester agent and further a higher quality surfactant using the same. SOLUTION: This sulfocarboxylic acid agent is provided by containing the sulfocarboxylic acid as a main component and <0.05 mass% content of an alkali metal based on the sulfocarboxylic acid, and also the sulfocarboxylic acid ester agent is provided by containing the sulfocarboxylic acid ester as a main component and <0.05 mass% content of an alkali metal based on the sulfocarboxylic acid ester. The sulfocarboxylic acid is suitably obtained by oxidizing a carboxylic acid having a thiol group by hydrogen peroxide. The sulfocarboxylic acid ester is suitably obtained by further esterifying the same. COPYRIGHT: (C)2007,JPO&INPIT
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