| 摘要 |
PROBLEM TO BE SOLVED: To provide a member coated with an amorphous SiO<SB>2</SB>film having not only a thermal shock resistance but also an excellent anticorrosiveness against an aqueous salt solution and a strong acid such as hydrochloric acid, sulfuric acid and nitric acid, and its forming method. SOLUTION: The member coated with an amorphous SiO<SB>2</SB>film is formed by heating and firing a polysilazane compound on the surface of a mirror surface-finished metal substrate, wherein the surface of the metal substrate has a surface roughness Ra:≤0.2μm or Ra: 0.2μm and Rz:≤0.5μm, the thickness of the amorphous SiO<SB>2</SB>film is 0.05-5μm, and the metal substrate is coated with anyone of the coating films consisting of a film of an ordinary carbon steel, a special steel, Ni or its alloy, Ti or its alloy, Al or its alloy or Cu or its alloy, a plating film comprising one of these metals or their alloys, and deposition films formed by a physical vapor deposition or a chemical vapor deposition comprising one of the above metals and alloys. COPYRIGHT: (C)2007,JPO&INPIT
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