| 摘要 |
PROBLEM TO BE SOLVED: To provide deposition equipment, through which a flaw is less likely to be generated on a substrate rear surface and reaction products are less likely to come off, after a thinning process. SOLUTION: The deposition equipment has a stage surface 1a for holding an object substrate 2, such that it makes point contacts, the object substrate 2 composed of a material with glass or Vickers hardness of about 5,374 N/mm<SP>2</SP>. The stage surface 1a is formed of stainless steel, whose arithmetic average height Ra in roughness curve is equal to or greater than 0.1μm and smaller than 0.3μm, and whose maximum height Ra in roughness curve is equal to or greater than 0.5μm and smaller than 2.5μm. COPYRIGHT: (C)2007,JPO&INPIT |
