发明名称 SHAPE PARAMETER DETERMINING METHOD, SHAPE PARAMETER DETERMINING DEVICE, AND COMPUTER PROGRAM
摘要 PROBLEM TO BE SOLVED: To stably determine a parameter for describing a theoretical shape corresponding to three-dimensional shape at a high speed. SOLUTION: Parametersα<SP>(k)</SP>andβ<SP>(k)</SP>are used as known quantity, and parameters x<SB>0</SB><SP>(k+1)</SP>and y<SB>0</SB><SP>(k+1)</SP>are determined so as to minimize square sum S(x<SB>0</SB><SP>(k+1)</SP>, y<SB>0</SB><SP>(k+1)</SP>,α<SP>(k)</SP>, andβ<SP>(k)</SP>) of the error of the distance from the shape measured data P<SB>i</SB>to the center axis 101. The determined parameters x<SB>0</SB><SP>(k+1)</SP>and y<SB>0</SB><SP>(k+1)</SP>are used as known quantity, and parametersα<SP>(k+1)</SP>andβ<SP>(k+1)</SP>are determined so as to minimize square sum S(x<SB>0</SB><SP>(k+1)</SP>, y<SB>0</SB><SP>(k+1)</SP>,α<SP>(k+1)</SP>, andβ<SP>(k+1)</SP>) of the error of the distance from the shape measured data P<SB>i</SB>to the center axis 101. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006349480(A) 申请公布日期 2006.12.28
申请号 JP20050175482 申请日期 2005.06.15
申请人 CANON INC 发明人 MIYAZAWA SEIICHI;SHINJO KATSUHIKO;YAMANA KAZUAKI
分类号 G01B21/20 主分类号 G01B21/20
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