| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet recording head with a highly accurate ink flow channel in a high yield. SOLUTION: In the method for manufacturing the liquid ejecting head having an energy generating element generating energy used for ejecting a liquid, an ejecting hole for ejecting the liquid, and the flow channel for supplying the liquid to the ejecting hole, the method comprises a step for forming a laminated material of a negative type photosensitive resin plurally laminating the negative type photosensitive resin through a light shielding film pattern for forming the flow channel on the substrate on which the energy generating element is formed, and a step for forming the ejecting hole and the flow channel by exposing and developing the laminated material through an ejecting hole mask. COPYRIGHT: (C)2007,JPO&INPIT
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