| 摘要 |
PROBLEM TO BE SOLVED: To highly reliably and electrically connect a common electrode and a passage unit with each other. SOLUTION: An actuator unit 21 with laminated piezoelectric sheets 41-43 is bonded to the passage unit 4. The common electrode 34 is arranged between the piezoelectric sheet 41 and the piezoelectric sheet 42. An opening of a hole 49a which penetrates the piezoelectric sheet 43 is formed in a bonding face to the passage unit 4 of the actuator unit 21. A conductive wire 49b electrically connected to the common electrode 34 is embedded in the hole 49a. A terminal 46 is formed at an end of the conductive wire 49b. A recessed part 30 is formed in a bonding face to the actuator unit 21 of the passage unit 4. A projection 30a is formed on a bottom face of the recessed part 30. The terminal 46 is brought into contact with and is electrically connected to the projection 30a. COPYRIGHT: (C)2007,JPO&INPIT
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