摘要 |
A micromechanical pressure sensor element, in particular for tire pressure measurement. The device has at least: a layer system having a diaphragm underneath which a cavity is formed, which is separated from an external space outside the pressure sensor element; a measuring device for measuring a deflection of the diaphragm; and a seismic mass formed on, underneath, or in the diaphragm. Furthermore, in a method for using such a pressure sensor element, the pressure sensor element is operatable in a sleep mode having lower power consumption and in an operating mode having higher power consumption; in the sleep mode a change in the measuring signals of the measuring device over time is checked, and if a relevant change in the measuring signals is detected, a position change is inferred and a switchover to the operating mode is performed, in which the measuring signals of the measuring device or the analysis signals formed from the measuring signals are transmitted via a transmitter, for example, an antenna.
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