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经营范围
发明名称
MT CVD PROCESS
摘要
申请公布号
KR100661977(B1)
申请公布日期
2006.12.27
申请号
KR20017011047
申请日期
2001.08.30
申请人
发明人
分类号
C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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