,申请号JP20030140819-传众专利搜索

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发明名称
摘要
申请公布号	JP3862671(B2)	申请公布日期	2006.12.27
申请号	JP20030140819	申请日期	2003.05.19
申请人		发明人
分类号	H01L21/205;H01S5/343;H01S5/323	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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