Cantilever-based detector device and method of manufacturing such a device

摘要

The detector comprises:
at least one cantilever (5) extending from a first part (2) towards a second part (3) across a gap (4), said cantilever (5) constituting a first optical waveguide; and
at least one second optical waveguide (6), positioned on said second part (3) and separated from the cantilever by a second gap (”X). The first part (2) comprises a first layer structure (21) and the second part (3) comprising a second layer structure (31, 32). The first layer structure and the second layer structure are selected so that in a neutral reference position, the cantilever (5) and the second optical waveguide (6) are misaligned.