INTERFEROMETRIC MEASURING DEVICE COMPRISING AN ADAPTATION DEVICE FOR ADAPTING THE LIGHT INTENSITY

摘要

An interferometric measuring device for three-dimensional measurement of shapes on an object to be measured having: a beam splitter receiving via an input light path, and splitting into measuring and reference light paths, light from a light source; an image pick-up, to which light reflected from the object and from a reference and brought into interference can be supplied via an output light path for conversion into electrical signals; an evaluation unit for determining the surface shape from the signals; and an adaptation device adapting the light intensity or interfering light signals. For increased measuring precision, the measuring device is configured to measure planar regions of the surface which extend over at least the measuring device's lateral resolution and the adaptation device is configured for adjusting the intensity of the light and/or the signals by locally varying reflective properties of the surface with respect to the measuring optics.