Dielectrics with copper diffusion barrier

摘要

New poly-o-hydroxyamides containing divalent polynuclear (hetero)aromatic residues in the polymer chain. Poly-o-hydroxyamides of formula (I). Y2 = -(Phe-O)n-E-(O-Phe)n-; Phe = phenylene; Y1, Y3 = as for Y2, or various optionally substituted (hetero)arylene groups, e.g. phenylene, naphthylene, pyrazinediyl, furandiyl (21 groups listed); Z1-Z3 = various tetravalent (hetero)aromatic groups, e.g. benzene-1,2,4,5-tetrayl, furan-2,3,4,5-tetrayl, fluorene-2,3,6,7-tetrayl (10 groups listed); A = (a) H, -CO(CH2)gCH3, -COCH=CH2, -CO-aryl etc. (14 groups listed) (if a = 0 and/or d = 1), or (b) OH, amino, -OCH2CH=CH2, aryloxy etc. (9 groups listed (if a = 1 and/or d = 0); E = various divalent polynuclear (hetero)aromatic groups, e.g. 1,1'-binaphthylene, pyrene-diyl, -Phe-CPh2-Phe- (10 groups listed); Ph = phenyl; R1 = H, -(CH2)fCH3, -(CH2)f-Ph, -COO(CH2)fCH3 or -COO(CH2)fPh; a, d, n = 0 or 1; b = 1-200; c = 0-200. Full definitions are given in the DEFINITIONS (Full Definitions) field. Independent claims are also included for the following: (1) Polybenzoxazoles (PBO) obtained from (I); (2) Method (M1) for the production of (I) by reacting monomers of formula H2N-Z(OR1)2-NH2 (II) with dicarboxylic acids or activated derivatives thereof of formula L-CO-Y-CO-L (III); (3) Method (M2) for the production of PBO by heating (I); (4) Electronic components (EC) with a dielectric containing PBO as above; (5) Method (M3) for the production of EC by coating a substrate with a solution of (I), evaporating the solvent, heating the resulting film to form PBO, structuring the PBO film to form a resist with trenches and contact holes, depositing a conductive material on the relief so as to fill the holes etc. and then removing excess conductive material; and (6) Method (M4) for the production of EC by coating a solution of (I) onto a substrate with trenches and contact holes between metallic surface structures, evaporating the solvent so that the trenches and holes are filled with (I) and then heating to form PBO. Z = Z1, Z2 or Z3; Y = Y1, Y2 or Y3; and L = OH or an activating group.